1:1 internal mode coupling strength in GaAs doubly-clamped MEMS beam resonators with linear and nonlinear oscillations
1:1 internal mode coupling strength in GaAs doubly-clamped MEMS beam resonators with linear and nonlinear oscillations
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DOI：
10.35848/1882-0786/abd198
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发表时间：
2020-12
影响因子：
2.3
通讯作者：
Ya Zhang;Yuri Yoshioka;I. Morohashi;Xin Liu
中科院分区：
文献类型：
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作者：
Ya Zhang;Yuri Yoshioka;I. Morohashi;Xin Liu
通过热调谐GaAs双箝位MEMS梁谐振器中两个箝位谐振模的频率，研究了1：1内模耦合强度。谐振频率的反交叉表明两个模式相互耦合，模式耦合强度通过两个模式的反交叉频率的分裂来估计。当振荡幅度从弱驱动线性区域调谐到强驱动非线性区域时，我们观察到频率分裂略有增加，这表明非线性振荡对模式耦合强度的贡献非常小。
We have investigated the 1:1 internal mode coupling strength in a GaAs doubly-clamped MEMS beam resonator by thermally tuning the frequencies of two neighbored resonant modes. The anti-crossing of the resonant frequencies indicates that the two modes couple with each other, and the mode coupling strength was estimated by the splitting of the anti-crossed frequencies of the two modes. When the oscillation amplitudes were tuned from the weakly-driven linear regime to the strongly-driven nonlinear regime, we observed slightly increased frequency splitting, indicating that the nonlinear oscillation only makes a very small contribution to the mode coupling strength.