Libraries of cluster-assembled titania films for chemical sensing
Libraries of cluster-assembled titania films for chemical sensing
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用于化学传感的簇组装二氧化钛薄膜库
DOI：
10.1063/1.2035874
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发表时间：
2005
期刊：
影响因子：
--
通讯作者：
P. Siciliano
中科院分区：
文献类型：
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作者：
T. Mazza;E. Barborini;I. Kholmanov;P. Piseri;G. Bongiorno;S. Vinati;P. Milani;C. Ducati;D. Cattaneo;A. Bassi;C. Bottani;A. Taurino;P. Siciliano
我们报告的纳米结构的TiO 2薄膜与纳米粒子晶相和尺寸的梯度库的制造。通过超声团簇束沉积，可以制备直径小于10 nm的金红石纳米颗粒，并将它们分散到共沉积的无定形二氧化钛基质中。在热退火时，金红石纳米晶体充当具有空间控制的金红石/金红石比的膜的生长种子。在微图案化基底上沉积具有可控晶相变化的薄膜，以制备挥发性有机化合物的化学电阻传感器阵列。通过沉积后的简单一步热处理，获得了具有不同纳米结构和性能的器件。
We report the fabrication of libraries of nanostructured TiO2 films with a gradient in nanoparticle crystalline phase and dimensions. By supersonic cluster beam deposition it is possible to produce rutile nanoparticles with a diameter smaller than 10nm and to spread them into a co-deposited amorphous titania matrix. Upon thermal annealing rutile nanocrystals act as growth seeds of a film with a spatially controlled rutile/anatase ratio. Films with controlled crystalline phase variation have been deposited on micropatterned substrate to produce arrays of chemoresistive sensors of volatile organic compounds. Devices with different nanocrystalline structures and performances are obtained by a simple one-step thermal treatment after deposition.