Mg Nanostructures Tailored by Glancing Angle Deposition
Mg Nanostructures Tailored by Glancing Angle Deposition
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DOI：
10.1021/cg901036a
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发表时间：
2010-01-01
影响因子：
3.8
通讯作者：
Zhao, Yiping
中科院分区：
文献类型：
--
作者：
He, Yuping;Zhao, Yiping
利用掠射角存款离子（GLAD）技术，在平坦和图案化的基底上，以0 ~ 10 rpm的基底转速制备了镁纳米结构，其表面原子扩散特性对纳米结构的生长有很大影响。取决于衬底旋转速度，Mg纳米结构由不同的纳米结构单元组成：在ω = 0 rpm下的纳米叶片（斜角沉积）、在ω = 0.1 rpm下的纳米叶片束、在ω = 1 rpm下与纳米叶片束混合的扁形纳米棒和在ω = 10 rpm下的扁形纳米棒。沉积在不同的Ω值的样品中的不同的纳米结构单元的形成被解释的沉积和扩散过程之间的竞争。此外，在Mg的斜角沉积过程中，衬底旋转90度，形成的样品由两层纳米叶片阵列组成，两层之间的夹角γ近似为33度，这是由于界面处的晶格匹配。宏观上，纳米结构单元的数量密度、宽度和厚度、样品的高度以及纳米结构的倾斜角度等结构参数强烈地依赖于衬底的旋转速度和衬底的特征。
Magnesium nanostructures, with the material characteristic of surface adatom diffusion strongly influencing the nanostructuring growl lid tiring physical vapor deposition, have been fabricated by a glancing angle deposit ion (G LAD) technique oil flat and patterned substrates at a substrate rotation speed ranging from omega = 0 rpm to omega = 10 rpm. Depending on the substrate rotation speed, the Mg nanostructures consist of different nanostructure units: a nanoblade at omega = 0 rpm (oblique angle deposition), a bundle of nanoblades at omega = 0.1 rpm, an oblate nanorod mixed with a bundle of nanoblades at omega = 1 rpm and an oblate nanorod at omega = 10 rpm. The formation of different nanostructure units in the samples deposited at different omega values is explained by the competition between the deposition and diffusion processes. In addition, during the oblique angle deposition of Mg, the substrate is rotated 90 degrees, and the formed sample is composed of two layers of nanoblade arrays with an included angle gamma approximate to 33 degrees between the two layers, resulting From a lattice match at the interface. Macroscopically, the structure parameters including the number density, width and thickness of the nanostructure units, the height of samples, and the tilting angle of the nanostructures, depend strongly oil both the substrate rotation speed and the substrate features.