Surface evaluation and evolution during hydrodynamic effect polishing for quartz glass.
Surface evaluation and evolution during hydrodynamic effect polishing for quartz glass.
复制标题
DOI：
10.1364/ao.53.006913
复制
发表时间：
2014-10
期刊：
影响因子：
1.9
通讯作者：
Wen-qiang Peng;Chao-liang Guan;Shengyi Li
中科院分区：
文献类型：
--
作者：
Wen-qiang Peng;Chao-liang Guan;Shengyi Li
流体动力效应抛光(HEP)是一种非接触式加工工艺，可以实现加工表面的原子级粗糙度。为了研究石英玻璃的亚表面结构，用氢氟酸溶液对HEP处理的石英玻璃表面进行了刻蚀。实践证明，HEP是一种表面光洁度达到原子级、表面/亚表面无损伤的抛光方法。结果表明，去除薄的再沉积层后，预抛光玻璃表面的微塑性划痕明显暴露。随着去除深度的增加，划痕逐渐去除，表面粗糙度迅速降低。当亚表面损伤被清楚地去除时，表面变得非常光滑，表面粗糙度保持在原子水平。实验结果表明，在抛光过程中，先去除平行于砂轮转轴的划痕等缺陷，然后再去除垂直于砂轮转轴的缺陷。
Hydrodynamic effect polishing (HEP), a noncontact machining process, can realize the processed surface roughness as small as atomic level. To investigate the subsurface structure, the HEP processed quartz glass surface was etched by the hydrofluoric acid solution. It has been proved that HEP is a polishing method with the ability to process the surface with atomic-level flatness and damage-free surface/subsurface. It has been found that the microplastic scratches on the lap prepolished glass were obviously exposed when the thin redeposition layer was removed. Then the scratches were gradually removed and surface roughness decreased quickly as the removal depth increased. The surface becomes very smooth and the surface roughness maintains at an atomic level when the subsurface damage is removed clearly. The experimental results demonstrated that the defects such as the scratches parallel to the rotational axis of the wheel were firstly removed during the polishing process, and then the defects vertical to the wheel rotational axis were removed.