Humidity sensing properties of K0.5Na0.5NbO3 powder synthesized by metal organic decomposition
Humidity sensing properties of K0.5Na0.5NbO3 powder synthesized by metal organic decomposition
复制标题
金属有机分解合成K0.5Na0.5NbO3粉末的湿敏性能
DOI：
10.1016/j.snb.2014.11.118
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发表时间：
2015-03-31
影响因子：
8.4
通讯作者：
Deng, Shuifeng
中科院分区：
文献类型：
--
作者：
Yuan, Mengjiao;Zhang, Yong;Deng, Shuifeng
采用金属有机物热分解法（MOD）合成了K 0. 5 Na 0. 5 NbO 3（KNN）粉体，并用X射线衍射仪（XRD）、场发射扫描电镜（FE-SEM）和能谱仪（EDS）对其进行了表征。采用旋涂法将KNN粉末涂覆在Al_2O_3陶瓷基片上，制成了由5对Ag-Pd叉指电极和Al_2O_3陶瓷基片组成的湿度传感器。研究了KNN湿敏元件在室温下相对湿度11- 95%范围内的湿敏特性。在60 Hz和100 Hz频率下，KNN湿度传感器阻抗在11%~ 95%RH的整个湿度范围内变化约为4个数量级。KNN湿度传感器的响应时间和恢复时间均在8和18 s左右，在60 Hz和100 Hz时的最大相对湿度均在2% RH左右。此外，在低湿度和低频率条件下，KNN湿度传感器的介电损耗因子（DF）值很小且变化不大，表明KNN湿度传感器具有良好的绝缘性能和可靠性。KNN粉体在制作高性能湿敏元件方面具有广阔的应用前景。(C)2014年爱思唯尔B。V.保留所有权利。
K0.5Na0.5NbO3 (KNN) powder is synthesized via a metal-organic decomposition (MOD) method and characterized by X-ray diffraction (XRD), field-emission scanning electron microscopy (FE-SEM), and energy dispersive spectrometer (EDS). A humidity sensor, which is consisted of five pairs of Ag-Pd interdigitated electrodes and an Al2O3 ceramic substrate, is fabricated by spin-coating the KNN powder on the substrate. The humidity sensing properties of the KNN humidity sensor are investigated at room temperature within the relative humidity (RH) range of 11-95%. The variations of the KNN humidity sensor impedance are about four orders of magnitude within the whole humidity range from 11% to 95% RH at the frequencies of 60 Hz and 100 Hz. The response time and recovery time of the KNN humidity sensor are all about 8 sand 18 s, and their maximum hystereses are all around 2% RH at 60 Hz and 100 Hz. Furthermore, at low RH and frequency conditions, the dielectric dissipation factor (DF) values of the KNN humidity sensor are small and hardly change, indicating that the KNN humidity sensor is of good insulating properties and reliability. The KNN powder is of broader potential applications for fabricating high performance humidity sensors. (C) 2014 Elsevier B. V. All rights reserved.