Holographic femtosecond laser processing for high-speed fabrication of sub-wavelength structures
Holographic femtosecond laser processing for high-speed fabrication of sub-wavelength structures
复制标题
用于高速制造亚波长结构的全息飞秒激光加工
DOI:
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发表时间:
2012
期刊:
影响因子:
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通讯作者:
Yoshio Hayasaki
中科院分区:
文献类型:
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作者:
Y. Mori;M. Yoshimura;T. Sasaki;and Y. Takahashi;山原 佳晃;Yoshio Hayasaki