Three-dimensional surface profile measurement of a cylindrical surface using a multi-beam angle sensor
Three-dimensional surface profile measurement of a cylindrical surface using a multi-beam angle sensor
复制标题
使用多光束角度传感器测量圆柱表面的三维表面轮廓
DOI：
10.1016/j.precisioneng.2019.11.009
复制
发表时间：
2020-03-01
影响因子：
3.6
通讯作者：
Takamasu, Kiyoshi
中科院分区：
文献类型：
--
作者：
Chen, Meiyun;Xie, Shengli;Takamasu, Kiyoshi
为了研究多光束角度传感器（MBAS）在高精度光学非球面和自由曲面（光学系统的关键部件）中的应用，提出了一种利用多光束角度传感器从角度数据重建非球面的方法。MBAS是基于一个多自准直系统和微透镜阵列，它可以将光束分成几个点，并可以将光强的质心检测转换为角度测量。MBAS通过周向扫描比其他方法更好地解决了曲率范围问题，并自动消除了工件旋转引起的倾斜误差。利用跟踪技术，mba可以从光强的中心测量自动确定焦点位置。这直接关系到测量角差的精度。实验结果证实了利用MBAS进行圆柱表面三维轮廓测量的可行性。
To investigate the application of the multi-beam angle sensor (MBAS) to high-precision optical aspheric and freeform surfaces, which are critical components in optical systems, we present a method of using an MBAS to reconstruct an aspheric surface from angle data. The MBAS is based on a multi-autocollimator system with a microlens array, which can split the beam into several spots and can convert centroid detection of the light intensity into an angle measurement. The MBAS is designed to address the curvature-range problem via a circumferential scan better than other methods and automatically eliminates the tilt error caused by rotation of a workpiece. Using a tracking technique, the MBAS can automatically determine focal spot positions from the centmid measurement of the light intensity. This is directly related to the accuracy of the angular difference measurement. The experimental results confirm the feasibility of using an MBAS for 3D surface profile measurements of cylindrical surfaces.