Surface micromachined linear electrostatic stepper motor
Surface micromachined linear electrostatic stepper motor
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表面微机械线性静电步进电机
DOI：
10.1109/memsys.1997.581806
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发表时间：
1997
期刊：
影响因子：
--
通讯作者：
M. Elwenspoek
中科院分区：
文献类型：
--
作者：
N. Tas;A. H. Sonnenberg;A.F.M. Sander;M. Elwenspoek
采用单次掩模表面微加工工艺，设计并制作了一种线性静电步进电机。它由两个驱动单元组成，这两个单元交替产生移动航天飞机的步骤。测量了夹具中的摩擦力和粘附力。测得摩擦系数为0.8/spl+Mn/0.3。夹子中的粘附力刚刚低到足以松开夹靴。成功地进行了步进循环，获得了15个/SPLµ/m的偏转，步长为2个/SPL Mu/m的数量级。在40V的驱动电压下，所产生的力等于3/spl mU/N。
A linear electrostatic stepper motor has been designed and fabricated in a single mask surface micromachining process. It consists of two drive units that alternately generate a step to move the shuttle. The friction and adhesion in the clamps has been measured. A friction coefficient of 0.8/spl plusmn/0.3 has been found. The adhesion in the clamp is just low enough to release the clamping shoe. Stepping cycles have been performed successfully to obtain a deflection of 15 /spl mu/m, with steps in the order of 2 /spl mu/m. The deflection is limited by the suspension. The generated force equals 3 /spl mu/N at 40 V driving voltage.