A silicon microfabricated aperture for counting cells using the aperture impedance technique
A silicon microfabricated aperture for counting cells using the aperture impedance technique
复制标题
使用孔径阻抗技术对细胞进行计数的硅微加工孔径
DOI：
10.1109/ccece.1999.804968
复制
发表时间：
1999
期刊：
影响因子：
--
通讯作者：
R. Muller
中科院分区：
文献类型：
--
作者：
K. Roberts;M. Parmeswaran;M. Moore;R. Muller
介绍了两种不同的微型血细胞计数器的设计、制造和测试。第一种设计利用深RIE硅刻蚀和阳极键合技术来生产能够使用孔径阻抗技术对电池进行计数的紧凑型流动电池。第二种设计展示了一种更简单的孔制造工艺，它似乎更适合于微型血细胞计数器。进行的测试表明，微制孔能够提供与目前可用的台式血细胞计数器相当的信号。
Design, fabrication and testing of two distinct miniature blood cell counters are presented. The first design utilizes a deep RIE silicon etch and anodic bonding technique to produce a compact flow cell capable of counting cells using the aperture impedance technique. The second design demonstrates a simpler aperture fabrication process that appears to be more ideally suited for miniature blood cell counters. Tests conducted indicate that the microfabricated aperture is capable of giving signals comparable to currently available desktop blood cell counters.