Soft x-ray nanobeam formed by an ellipsoidal mirror
Soft x-ray nanobeam formed by an ellipsoidal mirror
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DOI：
10.1063/1.5144932
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发表时间：
2020-03-23
影响因子：
4
通讯作者：
Mimura, Hidekazu
中科院分区：
文献类型：
--
作者：
Takeo, Yoko;Suzuki, Akihiro;Mimura, Hidekazu
椭球镜是一种很有前途的软x射线聚焦光学器件。研制了一种由母版制作和复制组成的制作工艺，用于生产孔径约为10 mm的宽口径椭球镜。在本研究中，使用SPring-8的软X射线光束线BL 25 SU-a中的软X射线来评估椭球镜的聚焦性能。焦点尺寸在300、400和500 eV的光子能量下测量。通过分析重叠关联成像法提取的聚焦光束的波场，定量评价了椭球镜的面形误差。在1 nm的均方根水平上，不同光子能量下测量的图形误差分布彼此一致。开发的聚焦系统可用于各种类型的显微镜，允许使用广泛的X射线能量。
Ellipsoidal mirrors are promising optical devices for soft x-ray focusing. A fabrication process consisting of master fabrication and replication has been developed to produce ellipsoidal mirrors with wide apertures of approximately 10mm. In the present study, the focusing performance of an ellipsoidal mirror was evaluated using soft x-rays in the soft x-ray beamline BL25SU-a of SPring-8. The focus sizes were measured at photon energies of 300, 400, and 500eV. A quantitative figure error of the ellipsoidal mirror was also evaluated by analyzing the wavefield of the focused beam retrieved using ptychography. The figure error distributions measured at different photon energies agreed with each other at a root mean square level of 1nm. The developed focusing system can be used for various types of microscopy, allowing the use of a wide range of x-ray energies.