Laser-Scan Lithography onto Ultra-Fine Pipes 100 μm in diameter
Laser-Scan Lithography onto Ultra-Fine Pipes 100 μm in diameter
复制标题
在直径 100 μm 的超细管道上进行激光扫描光刻
DOI：
10.1117/12.2240158
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发表时间：
2016
期刊：
影响因子：
--
通讯作者：
and Toshiyuki Horiuchi
中科院分区：
文献类型：
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作者：
Hiroshi Takahashi;Tomoya Sagara;and Toshiyuki Horiuchi
需要开发一种简单而有效的方法来制造圆柱形的微小部件，如用于电气测试系统的接触探头弹簧的弹簧部件。本文研究了用激光扫描光刻技术在直径为100μm的超细不锈钢管道上印刷用于刻蚀掩模的微细抗蚀剂图形。首先，在管道上涂上3μm厚的正胶。其次，抗蚀剂暴露在激光下。激光光源采用波长为408 nm的紫光激光器。激光光束被整形成一个圆形，并通过使用由10倍物镜和2倍成像透镜组成的简化投影光学装置将其缩小为1/20来照射在管道上。管子由转台卡盘支撑，通过上下移动和旋转的方式暴露出来。当激光光斑到达管道中心时，使用XY工作台调整管道位置。以每个90°旋转角度打印长度为180μm、间隔为70μm的线性排列的22个狭缝图案。也就是说，在曝光速度为110μm/S的情况下，总共绘制了88个狭缝。
It is required to develop a simple but effective method for fabricating micro components with cylindrical shapes such as spring parts used for contact-probe springs of electrical testing systems. Here, laser-scan lithography was researched for printing fine resist patterns used for etching masks on ultra-fine stainless-steel pipes with a diameter of 100 μm. At first, a pipe was coated with 3-μm thick positive resist. Second, the resist is exposed to laser light. As the laser light source, a violet laser with a wavelength of 408 nm was used. The laser beam was reshaped in a circle, and irradiated on the pipe by reducing it in 1/20 using a reduction projection optics composed of a 10X objective lens and a 2X imaging lens. The pipe was supported by the chuck of rotation stage, and exposured by moving it up and down and rotating it. The pipe position was adjusted as the laser spot came on the pipe center using the XY stage. Linearly arrayed 22 slit patterns with a length of 180 μm and a separation of 70μm were printed at each 90° rotation angle. That is, 88 slits in total were delineated at an exposure speed of 110 μm/s.