Large-scale range diffraction grating displacement sensor based on polarization phase-shifting
Large-scale range diffraction grating displacement sensor based on polarization phase-shifting
复制标题
基于偏振相移的大范围衍射光栅位移传感器
DOI：
10.1364/ao.59.000469
复制
发表时间：
2020-01-10
期刊：
影响因子：
1.9
通讯作者：
Zhao, Hongbo
中科院分区：
文献类型：
--
作者：
Li, Mengwei;Liang, Zhouxin;Zhao, Hongbo
提出并证明了一种方法，以改善衍射光栅位移传感器，同时实现纳米级的分辨率和扩展的操作范围。该方法利用偏振相移光路提取两个相位相差正交的正弦信号。应用插值电路将两个正弦信号非线性地转换为标准增量AB正交数字信号，实现了与激光相干长度大小相同的扩展工作范围。该方法实现了大范围位移测量，对高性能微位移传感器的设计具有重要的指导意义。(C)2020美国光学学会
A method is proposed and demonstrated to improve a diffraction grating displacement sensor to simultaneously achieve nanometer-level resolution and an extended range of operation. The method exploits the polarization phase-shifting optical path to extract two sinusoidal signals with a quadrature phase shift. The interpolation circuit is applied to nonlinearly convert two sinusoidal signals into a standard incremental AB quadrature digital signal, implementing an extended operation range with the magnitude of a laser coherence length. This work enables displacement measurement operated at large-scale range, and provides a significant guide for the design of a high performance micro-displacement sensor. (C) 2020 Optical Society of America