The sources for contaminants in the trace analysis of carbon in GaAs by secondary ion mass spectrometry
The sources for contaminants in the trace analysis of carbon in GaAs by secondary ion mass spectrometry
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二次离子质谱法痕量分析砷化镓中碳的污染物来源
DOI：
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发表时间：
1988
期刊：
影响因子：
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通讯作者：
K. Ishida
中科院分区：
文献类型：
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作者：
J. Kobayashi;M. Nakajima;K. Ishida
我们通过二次离子质谱 (SIMS) 研究了砷化镓中碳的痕量分析中的污染物来源。结果表明，碳的检测率主要受到初级离子束和/或记忆效应对残余气体中含碳分子的电离的限制，而不是这些分子沉积到样品表面上的限制。提出了利用SIMS定量分析GaAs中碳的模型。碳的检出限为(1–2)×1015 cm−3。即使在传统的真空压力（∼1×10−9 Torr）下，SIMS 也有可能达到中间 1014 cm−3 的检测限。我们研究了二次离子质谱（SIMS）痕量分析 GaAs 中碳的污染物来源。结果表明，碳的检测率主要受到初级离子束和/或记忆效应对残余气体中含碳分子的电离的限制，而不是这些分子沉积到样品表面上的限制。提出了利用SIMS定量分析GaAs中碳的模型。碳的检出限为(1–2)×1015 cm−3。即使在传统的真空压力（∼1×10−9 Torr）下，SIMS 也有可能实现中间 1014 cm−3 的检测极限。
We have studied the sources for contaminants in the trace analysis of carbon in GaAs by secondary ion mass spectrometry (SIMS). The results suggest that the detectivity of carbon is mainly limited by the ionization of carbon‐containing molecules in the residual gases by the primary ion beam and/or the memory effect rather than the deposition of these molecules onto the sample surface. The model for the quantitative analysis of carbon in GaAs by SIMS is presented. The detection limit of carbon is (1–2)×1015 cm−3. The possibility is also presented to achieve the detection limit of middle 1014 cm−3 by SIMS even at the conventional vacuum pressure (∼1×10−9 Torr).We have studied the sources for contaminants in the trace analysis of carbon in GaAs by secondary ion mass spectrometry (SIMS). The results suggest that the detectivity of carbon is mainly limited by the ionization of carbon‐containing molecules in the residual gases by the primary ion beam and/or the memory effect rather than the deposition of these molecules onto the sample surface. The model for the quantitative analysis of carbon in GaAs by SIMS is presented. The detection limit of carbon is (1–2)×1015 cm−3. The possibility is also presented to achieve the detection limit of middle 1014 cm−3 by SIMS even at the conventional vacuum pressure (∼1×10−9 Torr).