Helicon discharges and sources: a review
Helicon discharges and sources: a review
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DOI：
10.1088/0963-0252/24/1/014001
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发表时间：
2015-02-01
影响因子：
3.8
通讯作者：
Chen, Francis F.
中科院分区：
文献类型：
--
作者：
Chen, Francis F.
螺旋波是在直流磁场（B场）中低温部分电离等离子体中的波。螺旋子的研究涉及离子中性碰撞和拉莫尔轨道，即使在B场是均匀的。螺旋放电是由射频（RF）天线产生的螺旋波电离的。在螺旋放电的兴趣出现，因为高等离子体密度，他们产生的比较与其他射频源在可比的功率。半导体工业还没有利用这一点，即使已经证明了永磁体用于B场的可能性。尽管如此，大量的文献对helicons已经发展，因为许多问题，这些放电和有趣的物理发现，在他们的解决方案。
Helicon waves are waves in low-temperature, partially ionized plasmas in a dc magnetic field (B-field). The study of helicons involves both ion-neutral collisions and Larmor orbits, even when the B-field is uniform. Helicon discharges are ionized by helicon waves generated by a radiofrequency (RF) antenna. Interest in helicon discharges arose because of the high plasma densities they generate compared with other RF sources at comparable powers. The semiconductor industry has not taken advantage of this, even since the possible use of permanent magnets for the B-field has been demonstrated. Nonetheless, a large literature on helicons has evolved because of the numerous problems these discharges posed and the interesting physics found in their solutions.