Fabrication and test of a micro electromagnetic actuator
Fabrication and test of a micro electromagnetic actuator
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DOI：
10.1016/j.sna.2003.10.079
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发表时间：
2005-01-03
影响因子：
4.6
通讯作者：
Yang, SS
中科院分区：
文献类型：
--
作者：
Kim, KH;Yoon, HJ;Yang, SS
本文介绍了一种可单独驱动的三膜片电磁微致动器的制作、测试结果和有限元分析。该执行器由对二甲苯隔膜、螺旋铜线圈和永磁体组成。对二甲苯是防水的，与金属、硅和硅化合物相比，它的杨氏模数很小。因此，对于微泵的执行机构膜片来说，它是足够的。进行了静、动态特性试验。当输入电流幅值为100 mA，占空比为50%时，平膜片和波纹膜片在1 Hz时的静态偏移量分别为15和30微米。(C)2003爱思唯尔B.V.保留所有权利。
This paper presents the fabrication, test results and the finite element analysis of an electromagnetic micro actuator with three diaphragms that can be driven individually. The actuator consists of parylene diaphragms, spiral copper coils and permanent magnets. Parylene is waterproof and its Young's modulus is small compared with metals, silicon and silicon compounds. So, it is adequate for the actuator diaphragm of a micropump. The static and dynamic characteristic tests are performed. The static deflections of the flat diaphragm and the corrugated one are 15 and 30 mum at 1 Hz, respectively, when the input current amplitude is 100 mA and the duty ratio is 50%. (C) 2003 Elsevier B.V. All rights reserved.