Low-Temperature, Scalable, Reactive Deposition of Tin Oxide for Perovskite Solar Cells
Low-Temperature, Scalable, Reactive Deposition of Tin Oxide for Perovskite Solar Cells
复制标题
用于钙钛矿太阳能电池的氧化锡的低温、可扩展、反应沉积
DOI：
10.1002/solr.202200263
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发表时间：
2022
期刊：
影响因子：
7.9
通讯作者：
Blackburn D
中科院分区：
文献类型：
--
作者：
Blackburn D
氧化锡(SnOx)电子萃取层是在氧气分压下从金属源中通过反应电子束蒸发工艺制备的。然后将它们用于标准(n-i-p)结构的钙钛矿型太阳能电池，实现了高达19.3%的功率转换效率。与类似技术相比，SnOxx沉积工艺是在保持较低温度的衬底上进行的，薄膜不需要任何后续的高温后沉积退火。这证明了反应电子束蒸发与柔性聚合物基板上的卷到卷加工的潜在兼容性。
Tin oxide (SnOx) electron‐extraction layers are fabricated via a reactive electron‐beam evaporation process from a metal source under a partial pressure of oxygen. These are then used in standard (n‐i‐p) architecture perovskite solar cells and achieve power conversion efficiencies up to 19.3%. The SnOxdeposition process is performed onto substrates maintained at low temperature compared to similar techniques, with films not requiring any subsequent high‐temperature post‐deposition annealing. This demonstrates the potential compatibility of reactive electron‐beam evaporation with roll‐to‐roll processing onto flexible polymeric substrates.