Deterministic Assembly of Three-Dimensional Suspended Nanowire Structures
Deterministic Assembly of Three-Dimensional Suspended Nanowire Structures
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DOI：
10.1021/acs.nanolett.9b02198
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发表时间：
2019-08-01
期刊：
影响因子：
10.8
通讯作者：
Yao, Jun
中科院分区：
文献类型：
--
作者：
Gao, Hongyan;Yin, Bing;Yao, Jun
以可寻址方式控制纳米线三维 (3D) 几何结构的组装可以实现先进的 3D 设备集成和应用。通过结合确定性平面纳米线组装和转移过程，我们在此展示了一种构建垂直突出和悬浮纳米线结构的通用方法。该方法利用这两个过程的优点来对单个纳米线进行位置和几何控制。多次传输可以进一步形成分层多线 3D 结构。组装的 3D 纳米线结构具有明确定义的基板端子，可实现可扩展的寻址和集成。基于组装的 3D 纳米线结构的概念验证纳米传感器可以实现力检测的高灵敏度。
Controlled assembly of nanowire three-dimensional (3D) geometry in an addressable way can lead to advanced 3D device integration and application. By combining a deterministic planar nanowire assembly and a transfer process, we show here a versatile method to construct vertically protruding and suspending nanowire structures. The method harnesses the merits from both processes to yield positional and geometric control in individual nanowires. Multiple transfers can further lead to hierarchical multiwire 3D structures. Assembled 3D nanowire structures have well-defined on-substrate terminals that allow scalable addressing and integration. Proof-of-concept nanosenors based on assembled 3D nanowire structures can achieve high sensitivity in force detection.