Bulk micromachined 2D lens scanners for transparent optical fiber switches
Bulk micromachined 2D lens scanners for transparent optical fiber switches
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用于透明光纤开关的批量微机械二维透镜扫描仪
DOI：
10.1109/omems.2002.1031420
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发表时间：
2002
期刊：
影响因子：
--
通讯作者：
H. Toshiyoshi
中科院分区：
文献类型：
--
作者：
K. Saruta;Hiroyuki Fujita;H. Toshiyoshi
作为构建3D MEMS光交叉连接器（OXC）的另一种方法，我们提出了体微机械静电2D透镜扫描器阵列，而不是倾斜镜。在仔细研究了MEMS OXC的光学和机械设计之后，我们得出结论，准直透镜对光机械切换性能具有最显著的影响。
As an alternative approach of constructing 3D MEMS optical crossconnectors; (OXC), we propose bulk micromachined electrostatic 2D lens-scanner arrays instead of tilting mirrors. Having carefully investigated the optical and mechanical designs of MEMS OXC, we have concluded that collimator lenses have the most significant influence upon the optomechanical switching performance.