A three-degree-of-freedom measurement system for measuring straightness errors and their position based on the Faraday effect
A three-degree-of-freedom measurement system for measuring straightness errors and their position based on the Faraday effect
复制标题
基于法拉第效应测量直线度误差及其位置的三自由度测量系统
作者：
张恩政;滕雪英;陈本永;张世华;李朝阳
提出了一种基于法拉第效应的三自由度测量系统，用于同时测量二维直线度误差及其位置。由于法拉第旋转器的法拉第效应，当线偏振光束来回通过同一个法拉第旋转器两次时，线偏振光束的方向可以改变90°。设计了一种新颖的光学结构，将干涉测量技术和位置敏感检测技术巧妙地结合在一起，发挥了它们的优点。详细描述了测量原理。讨论了半透镜角度误差对直线度测量的影响。为了验证该系统的可行性，搭建了三自由度测量实验装置并进行了一系列实验。
A three-degree-of-freedom measurement system based on the Faraday effect is proposed for simultaneously measuring two-dimensional straightness errors and their position. Thanks to the Faraday effect of faraday rotator, the direction of linearly polarized beam can be changed by 90° when the linearly polarized beam passes through the same Faraday rotator back and forth twice. A novel optical configuration is designed, which can integrate the interferometry and position sensitive detection technology ingeniously and put their advantages together. The measurement principle is described in detail. The influence of angle error of the semi-transparent mirror on straightness measurement is discussed. To verify the feasibility of the proposed system, the experimental setup for measuring three degrees of freedom was constructed and a series of experiments were carried out.