Reversible modification of CdTe surface composition by excimer laser irradiation
Reversible modification of CdTe surface composition by excimer laser irradiation
复制标题
准分子激光辐照对 CdTe 表面成分的可逆改性
DOI：
10.1063/1.103844
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发表时间：
1990
影响因子：
4
通讯作者：
G. Olson
中科院分区：
文献类型：
--
作者：
P. Brewer;J. Zinck;G. Olson
KrF准分子激光在低于熔体阈值（≤75 mJ/cm2）的影响下照射CdTe，去除表面层，并在表面组成中产生可逆的变化，这取决于激光影响和传递到表面的激光脉冲数。在高于~ 40 mJ/cm2的影响下，得到富Te层。化学计量成分可以通过降低激光辐照量来恢复。主要的解吸产物是Cd和Te2，这些物质的解吸速度用麦克斯韦分布很好地描述。CdTe表面组成的影响变化符合基于Te2的形成和解吸与Cd原子从激光照射表面解吸之间竞争的光热机制。
KrF excimer laser irradiation of CdTe at fluences below the melt threshold (≤75 mJ/cm2) removes surface layers and produces reversible changes in the surface composition that depend upon the laser fluence and number of laser pulses delivered to the surface. At fluences above ∼40 mJ/cm2 a Te‐rich layer is obtained. A stoichiometric composition can be restored by irradiation at reduced laser fluence. The primary desorption products are Cd and Te2, and the velocities of these species are well described by a Maxwellian distribution. The fluence‐dependent changes in CdTe surface composition are consistent with a photothermal mechanism based on the competition between formation and desorption of Te2 and desorption of Cd atoms from the laser‐irradiated surface.