Full-field hard X-ray nano-tomography at SSRF.
Full-field hard X-ray nano-tomography at SSRF.
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DOI：
10.1107/s1600577523003168
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发表时间：
2023-07-01
影响因子：
2.5
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中科院分区：
文献类型：
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针对 SSRF 光束线 BL18B 开发的两种 TXM 分辨率模式，演示了高 Z 和低 Z 材料样品的全视场硬 X 射线纳米断层扫描。自行设计的透射 X 射线显微镜 (TXM) 仪器已在上海同步辐射装置 (SSRF) 的光束线 BL18B 上开发并投入使用。 BL18B 是最近在 TXM 中构建的硬 (5–14 keV) X 射线弯曲磁体束线，空间分辨率低于 20 nm。有两种分辨率模式：一种基于使用基于高分辨率的闪烁体透镜耦合相机，另一种基于使用基于中等分辨率的X射线sCMOS相机。在这里，展示了两种分辨率模式下高 Z 材料样品（例如 Au 颗粒、电池颗粒）和低 Z 材料样品（例如 SiO2 粉末）的全场硬 X 射线纳米断层扫描。三维 (3D) 分辨率已达到 50 nm 至 100 nm 以下。这些结果代表了具有纳米级空间分辨率的 3D 无损表征在许多研究领域的科学应用的能力。
A demonstration of full-field hard X-ray nano-tomography for high- and low-Z material samples is presented for the two TXM resolution modes developed at beamline BL18B at SSRF. An in-house designed transmission X-ray microscopy (TXM) instrument has been developed and commissioned at beamline BL18B of the Shanghai Synchrotron Radiation Facility (SSRF). BL18B is a hard (5–14 keV) X-ray bending-magnet beamline recently built with sub-20 nm spatial resolution in TXM. There are two kinds of resolution mode: one based on using a high-resolution-based scintillator-lens-coupled camera, and the other on using a medium-resolution-based X-ray sCMOS camera. Here, a demonstration of full-field hard X-ray nano-tomography for high-Z material samples (e.g. Au particles, battery particles) and low-Z material samples (e.g. SiO2 powders) is presented for both resolution modes. Sub-50 nm to 100 nm resolution in three dimensions (3D) has been achieved. These results represent the ability of 3D non-destructive characterization with nano-scale spatial resolution for scientific applications in many research fields.