OPTICAL IMEMS ® – A FABRICATION PROCESS FOR MEMS OPTICAL SWITCHES WITH INTEGRATED ON-CHIP ELECTRONICS
OPTICAL IMEMS ® – A FABRICATION PROCESS FOR MEMS OPTICAL SWITCHES WITH INTEGRATED ON-CHIP ELECTRONICS
复制标题
光学 IMEMS ® – 具有集成片上电子器件的 MEMS 光学开关的制造工艺
DOI：
10.1109/iedm.2012.6478989
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发表时间：
2003
期刊：
影响因子：
--
通讯作者：
M. Davis
中科院分区：
文献类型：
--
作者：
T. Brosnihan;S. A. Brown;A. Brogan;C. Gormley;D. Collins;S. Sherman;M. Lemkin;N. Polce;M. Davis
硅微加工生产小型、精密、可移动部件的能力为MEMS元件在光通信网络中的应用提供了机会[1,2]。为了解决这个潜在的市场，adi公司开发了光学iMEMS工艺，用于制造集成芯片上电子器件的MEMS光学元件。虽然该工艺可用于制造各种光学元件，包括用于精确对准的反射镜，百叶窗和致动器，但我们在这里报告了用于光开关的MEMS反射镜。该器件由带有片上高压驱动电子器件的双框架反射镜和用于电容式位置传感的低压CMOS组成。反射镜可以围绕x轴和y轴倾斜，在倾斜的两个方向上都有位置感。
The ability of silicon micromachining to produce small, precision, movable parts provides an opportunity for MEMS component use in optical communications networks [1,2]. To address this potential market, Analog Devices has developed the Optical iMEMS process for fabricating MEMS optical components with integrated, onchip electronics. While this process could be used to make a variety of optics components including mirrors, shutters and actuators for precision alignment, we report here on a MEMS mirror for optical switching. The device consists of a double-gimbaled mirror with on-chip high voltage drive electronics and low-voltage CMOS for capacitive position sense. The mirror can tilt about both the Xand Y-axis, with position sense in both directions of tilt.