Interlaboratory comparison measurements of aspheres
Interlaboratory comparison measurements of aspheres
复制标题
非球面的实验室间比较测量
DOI：
10.1088/1361-6501/aaae96
复制
发表时间：
2018
影响因子：
2.4
通讯作者：
C. Elster
中科院分区：
文献类型：
--
作者：
R. Schachtschneider;I. Fortmeier;M. Stavridis;J. Asfour;G. Berger;R. Bergmann;A. Beutler;T. Blümel;H. Klawitter;K. Kubo;J. Liebl;F. Löffler;R. Meeß;C. Pruss;D. Ramm;M. Sandner;G. Schneider;M. Wendel;I. Widdershoven;M. Schulz;C. Elster
对高质量非球面的需求正在迅速增长，这就需要提高其测量精度。由于非球面形状测量技术的复杂性，很难对其进行可靠的不确定度评定。为了探索当前非球面形状测量技术的准确性，对8个实验室的4个非球面进行了实验室间的比较，分别使用触觉测量、光学点测量和光学面积测量。总共使用了12种不同的设备。在从测量中减去设计地形和随后的最佳匹配球体之后，对测量结果进行了分析。将以这种方式简化的表面与通过在1000×1000笛卡尔网格上跨简化地形集合的逐点中值获得的参考地形进行比较。根据峰谷偏差和均方根偏差等几个特征，分析了简化地形与参考地形的偏差。在89 nm范围内，还原形貌与参考形貌的均方根偏差在几十纳米量级，大多数偏差小于20 nm。我们的结果表明了目前在非球面形状测量中可以预期的精度。
The need for high-quality aspheres is rapidly growing, necessitating increased accuracy in their measurement. A reliable uncertainty assessment of asphere form measurement techniques is difficult due to their complexity. In order to explore the accuracy of current asphere form measurement techniques, an interlaboratory comparison was carried out in which four aspheres were measured by eight laboratories using tactile measurements, optical point measurements, and optical areal measurements. Altogether, 12 different devices were employed. The measurement results were analysed after subtracting the design topography and subsequently a best-fit sphere from the measurements. The surface reduced in this way was compared to a reference topography that was obtained by taking the pointwise median across the ensemble of reduced topographies on a 1000×1000 Cartesian grid. The deviations of the reduced topographies from the reference topography were analysed in terms of several characteristics including peak-to-valley and root-mean-square deviations. Root-mean-square deviations of the reduced topographies from the reference topographies were found to be on the order of some tens of nanometres up to 89 nm, with most of the deviations being smaller than 20 nm. Our results give an indication of the accuracy that can currently be expected in form measurements of aspheres.