Birefringent reconfigurable metasurface at visible wavelengths by MEMS nanograting
Birefringent reconfigurable metasurface at visible wavelengths by MEMS nanograting
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DOI：
10.1063/1.5046976
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发表时间：
2018-10
影响因子：
4
通讯作者：
T. Shimura;T. Kinoshita;Y. Koto;N. Umeda;K. Iwami
中科院分区：
文献类型：
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作者：
T. Shimura;T. Kinoshita;Y. Koto;N. Umeda;K. Iwami
将在可见光下表现出很高双折射特性的Au纳米级亚表面与微电子机械系统致动器相结合，得到了一种可见光波段的双折射可重构亚表面。该系统基于纳米刻度的静电离面运动，采用微细加工技术研制而成。通过在0-200V范围内施加电压，在633 nm处实现了25.3°(21.5°~46.8°)的延迟调制，通过将在可见光下表现出很高的双折射特性的Au纳米级亚表面与微电子机械系统驱动器相结合，获得了可见光波长下的双折射可重构亚表面。该系统基于纳米刻度的静电离面运动，采用微细加工技术研制而成。通过施加0-200V的电压，在633 nm处实现了最大25.3°(从21.5°到46.8°)的延迟调制。
A birefringent reconfigurable metasurface at visible wavelengths was obtained by combining an Au nanograting metasurface, which shows very high birefringence characteristics in visible light, and a microelectromechanical system actuator. The system was based on the electrostatic out-of-plane motion of the nanograting and it was developed by microfabrication. The modulation of retardation was achieved at a wavelength of 633 nm by up to 25.3° (from 21.5° to 46.8°) by applying a voltage in the range of 0–200 V.A birefringent reconfigurable metasurface at visible wavelengths was obtained by combining an Au nanograting metasurface, which shows very high birefringence characteristics in visible light, and a microelectromechanical system actuator. The system was based on the electrostatic out-of-plane motion of the nanograting and it was developed by microfabrication. The modulation of retardation was achieved at a wavelength of 633 nm by up to 25.3° (from 21.5° to 46.8°) by applying a voltage in the range of 0–200 V.