Factors influencing surface quality and impurity distribution in silicon ribbons grown by the capillary action shaping technique (CAST)
Factors influencing surface quality and impurity distribution in silicon ribbons grown by the capillary action shaping technique (CAST)
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影响毛细管作用成形技术(CAST)生长的硅带表面质量和杂质分布的因素
DOI:
10.1016/0022-0248(80)90241-9
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发表时间:
1980
影响因子:
1.8
通讯作者:
Kei
中科院分区:
文献类型:
--
作者:
T. Ciszek;G. Schwuttke;Kei