Surface acoustic wave sensors
Surface acoustic wave sensors
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DOI：
10.1143/jjap.43.2799
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发表时间：
2004-05-01
期刊：
影响因子：
--
通讯作者：
Kondoh, J
中科院分区：
文献类型：
--
作者：
Shiokawa, S;Kondoh, J
声波传感器在检测与其表面接触的固体或流体材料的性质方面具有高度灵敏度，包括表面质量变化、液体密度、液体粘度和电导率。本文首先对常用的声波传感器进行了综述，并对它们的质量灵敏度进行了比较。本文介绍了在36 °旋转Y切X传播LiTaO_3上使用水平剪切声表面波（SH-SAW）传感器的传感系统的基本原理。由于电扰动的高灵敏度是SH-SAW传感器的一个显着的优点，它的应用基于声电相互作用也被提出。
Acoustic wave sensors are highly sensitive in detecting the properties of solid or fluid materials in contact with their surfaces, including the surface mass change, liquid density, liquid viscosity and electrical conductivity. In this paper, primarily, the commonly used acoustic wave sensors are reviewed and their mass sensitivities are compared. The fundamentals of the sensing system using the shear horizontal surface acoustic wave (SH-SAW) sensor on a 36degrees rotated Y-cut X-propagating LiTaO3 are described. Since the high sensitivity of the electrical perturbation is a significant advantage of the SH-SAW sensor, its applications based on acoustoelectric interaction are also presented.