Ion-beam characteristics of novel helicon ion sources for different plasma parameters
Ion-beam characteristics of novel helicon ion sources for different plasma parameters
复制标题
不同等离子体参数下新型螺旋离子源的离子束特性
DOI:
10.1063/1.1150467
复制
发表时间:
2000
影响因子:
1.6
通讯作者:
W. Choe
中科院分区:
文献类型:
--
作者:
I. Hong;Y. Hwang;G. H. Lee;Doyeon Kim;Hyun;G. Eom;W. Choe
A high-current ion source requires a high-density plasma source to provide sufficient ions to be accelerated. For a continuous high-power ion source, a new concept ion source using a helicon plasma source has been developed. A compact high-density helicon plasma is generated with very high-power efficiency, and ion beams are extracted from the plasma source. With various plasma parameters, extracted ion-beam characteristics are studied in a helicon ion source for the first time. Plasma parameters, especially plasma density, are shown to be strongly correlated with the extracted beam characteristics.