Electrode‐Limited Dielectric Breakdown of Alkali Free Glass
Electrode‐Limited Dielectric Breakdown of Alkali Free Glass
复制标题
无碱玻璃的电极限制介电击穿
DOI：
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发表时间：
2012
期刊：
影响因子：
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通讯作者：
M. Lanagan
中科院分区：
文献类型：
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作者：
T. Murata;Priyanka Dash;E. Furman;C. Pantano;M. Lanagan
测量了不同厚度的无碱玻璃的介电击穿统计量，电极具有可控的形貌和连续性。当玻璃基板厚度从58μm减小到5 mm时，特征击穿场强分别从400 mV/m增加到1100 mV/m。拉制和刻蚀的玻璃基板的表面粗糙度RMS值在0.9-1.8纳米范围内，与玻璃基板的厚度相比较小。玻璃刻蚀本身对介电击穿强度没有显著影响。介电击穿强度也与溅射沉积电极成分(Au，Pt)无关，但电极厚度对击穿过程起着重要的控制作用。对于较厚的电极，金电极的形态从连续的片状过渡到非常薄的电极(2 nm厚)的离散的纳米级岛。这种薄的电极形态为探索威布尔模量值接近100的玻璃的本征性质和高介电击穿强度(1100 mV/m)提供了一个独特的机会。
The dielectric breakdown statistics of alkali-free glass was determined for various thicknesses with electrodes having controlled morphology and continuity. The characteristic electrical breakdown field strength increased from 400 to 1100 MV/m as the glass substrate thickness decreased from 58 to 5 μm, respectively. Surface roughness RMS values of as-drawn and etched glass substrates were in the 0.9–1.8 nm range, which is small in comparison to the glass substrate thickness. The glass etching, itself did not have significant effect on the dielectric breakdown strength. The dielectric breakdown strength was also independent of the sputtered-deposited electrode composition (Au,Pt); however, electrode thickness played an important role in controlling the breakdown process. The Au electrode morphology transitioned from a continuous sheet for thicker electrodes to discrete nano-scale islands for very thin electrodes (<2 nm thick). The thin electrode morphology provides a unique opportunity to explore the intrinsic properties and high dielectric breakdown strength regime (1100 MV/m) in glasses with Weibull modulus values approaching 100.