Optical proximity correction in geometry sensitive silicon photonics waveguide crossings
Optical proximity correction in geometry sensitive silicon photonics waveguide crossings
复制标题
几何敏感硅光子波导交叉点中的光学邻近校正
DOI：
10.1109/group4.2017.8082188
复制
发表时间：
2017
期刊：
影响因子：
--
通讯作者：
E. Bernier
中科院分区：
文献类型：
--
作者：
D. Celo;P. Dumais;W. Liu;C. Zhang;D. Goodwill;J. Jiang;E. Bernier
使用多模干涉仪的硅波导交叉对内部角的几何形状高度敏感。光学接近校正采用实验设计，无需复杂的铸造建模。这种简单的技术将损耗提高了2倍，达到<30 mdB，同时保持了c波段的平坦度。
Silicon waveguide crossings using multi-mode interferometers are highly sensitive to geometry at the internal corners. Optical proximity correction was developed using design-of-experiments without sophisticated foundry modeling. This simple technique improved loss by a factor of 2, to <30 mdB, while maintaining flatness over C-band.