Transverse mode selection in large-area oxide-confined vertical-cavity surface-emitting lasers using a shallow surface relief
Transverse mode selection in large-area oxide-confined vertical-cavity surface-emitting lasers using a shallow surface relief
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DOI：
10.1109/68.806837
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发表时间：
1999-12
影响因子：
2.6
通讯作者：
H. Martinsson;J. Vukusic;M. Grabberr;R. Michalzik;R. Jager;K. Ebeling;A. Larsson
中科院分区：
文献类型：
--
作者：
H. Martinsson;J. Vukusic;M. Grabberr;R. Michalzik;R. Jager;K. Ebeling;A. Larsson
在大面积氧化物限制的垂直腔面发射激光器（VCSEL）中，通过刻蚀浅（仅40 nm深）的表面浮雕引入了横向模式选择。用于基模选择的圆形浮雕图案选择低阶模，导致与没有表面浮雕的VCSEL相比显著减小的光束发散（在整个驱动电流范围内从48/spl deg/减小到13/spl deg/以及更小）和改进的光谱纯度（发射光谱的宽度从5减小到小于0.3nm）。测得最大输出功率为10 mW。
Transverse mode selection has been introduced in a large area oxide-confined vertical-cavity surface-emitting laser (VCSEL) by etching a shallow (only 40-nm deep) surface relief. The circular relief pattern, intended for fundamental mode selection, selects low order modes, resulting in significantly reduced beam divergence (from 48/spl deg/ to 13/spl deg/ and less over the entire drive current range) and improved spectral purity (width of emission spectrum reduced from 5 to less than 0.3 nm) compared to VCSEL's without surface relief. A maximum output power of 10 mW was measured.