Wear-resistive and electrically conductive nitrogen-containing DLC film consisting of ultra-thin multilayers prepared by using filtered arc deposition
Wear-resistive and electrically conductive nitrogen-containing DLC film consisting of ultra-thin multilayers prepared by using filtered arc deposition
复制标题
采用过滤电弧沉积法制备的超薄多层耐磨导电含氮DLC薄膜
DOI：
10.7567/1347-4065/ab1472
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发表时间：
2019
影响因子：
1.5
通讯作者：
H. Gonda
中科院分区：
文献类型：
--
作者：
T. Harigai;K. Tamekuni;Y. Iijima;S. Degai;T. Tanimoto;Y. Suda;H. Takikawa;S. Kaneko;S. Kunitsugu;H. Habuchi;M. Kamiya;M. Taki;H. Gonda
