Tuning of electrical and structural properties of indium oxide films grown by metal organic chemical vapor deposition
Tuning of electrical and structural properties of indium oxide films grown by metal organic chemical vapor deposition
复制标题
DOI:
10.1016/j.tsf.2006.11.079
复制
发表时间:
2007-06
期刊:
影响因子:
2.1
通讯作者:
Ch. Y. Wang;V. Cimalla;H. Romanus;T. Kups;M. Niebelschütz;O. Ambacher
中科院分区:
文献类型:
--
作者:
Ch. Y. Wang;V. Cimalla;H. Romanus;T. Kups;M. Niebelschütz;O. Ambacher