Effects of Deposition Temperature on the Structure and Hardness of BN Films Prepared by a Gradient Temperature Method
Effects of Deposition Temperature on the Structure and Hardness of BN Films Prepared by a Gradient Temperature Method
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DOI：
10.1016/s1875-5372(15)30076-x
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发表时间：
2015-05
影响因子：
0.7
通讯作者：
Wang Ming'e;Gong Shuili;Ma Guojia;Liu Xing;Zhang Lin;Wang Da-wang;Lu Wenqi;Dong Chuang
中科院分区：
文献类型：
--
作者：
Wang Ming'e;Gong Shuili;Ma Guojia;Liu Xing;Zhang Lin;Wang Da-wang;Lu Wenqi;Dong Chuang
