Nitrogen implantation of metals
Nitrogen implantation of metals
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金属氮注入
DOI：
10.1063/1.334504
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发表时间：
1985
影响因子：
3.2
通讯作者：
S. Vahvaselkä
中科院分区：
文献类型：
--
作者：
A. Anttila;J. Keinonen;M. Uhrmacher;S. Vahvaselkä
利用核共振增宽和卢瑟福后向散射技术研究了16种被300 keV N2+离子注入饱和的金属。在Mg， Al, Ti， V, Cr, Nb, Mo, Ta， W和AISI 304钢中观察到由注入氮引起的水泡，而在Cu， Zr, Ag， Hf和Au钢中没有。最大标称饱和浓度在50 ~ 60 at之间变化。除Cu， Ag和Au外，所有情况下都是20 %。表面硬度一般以1.2 ~ 2.3的倍数增加。然而，Mo、Ag和Au的含量没有增加。用x射线衍射证实了Ti、Zr和Hf中的单氮化物的形成。讨论了氮化物制备过程中水泡的形成和扩散。
Sixteen metals implanted to saturation with 300‐keV N2+ ions have been studied using nuclear resonance broadening and Rutherford backscattering techniques to profile the implanted concentration. Blisters due to the implanted nitrogen were observed in Mg, Al, Ti, V, Cr, Nb, Mo, Ta, W, and AISI 304 steel but not in Cu, Zr, Ag, Hf, and Au. The nominal saturation concentration at maximum varied from 50 to 60 at. % for all cases except for Cu, Ag, and Au, where it was 20 at. %. The surface hardness was generally increased by a factor between 1.2 and 2.3. However, no increase was observed for Mo, Ag, and Au. The mononitride formation in Ti, Zr, and Hf was verified by x‐ray diffraction. The formation of blisters and diffusion in the preparation of nitrides is discussed.