Design, Fabrication and Experimental Validation of a Steerable, Laser-Driven Microrobot in Dry Environments
Design, Fabrication and Experimental Validation of a Steerable, Laser-Driven Microrobot in Dry Environments
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DOI：
10.1109/case48305.2020.9216958
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发表时间：
2020-08
期刊：
影响因子：
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通讯作者：
Zhong Yang;A. Sherehiy;S. Chowdhury;Danming Wei;Ruoshi Zhang;D. Popa
中科院分区：
文献类型：
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作者：
Zhong Yang;A. Sherehiy;S. Chowdhury;Danming Wei;Ruoshi Zhang;D. Popa
在本文中，我们讨论的设计和验证方法的SerpenBot，一个激光驱动的microrobot，在干燥的环境中工作，可以被引导。微型机器人包括一个新的谐振腿机制，耦合与Nd：YAG脉冲激光束在可调频率，从而产生差分驱动力，可以选择性地用于驱动和转动的微型机器人。具体来说，SerpenBot包括两个具有蛇形设计和运动放大弯曲的微加工硅热致动器，它们使用不同的调制激光脉冲频率进行激励。我们目前的分析，模拟和实验结果表明，成功的机动性的SerpenBot干硅基板上。
In this paper, we discuss the design and validation methodology of SerpenBot, a laser-driven microrobot that operates in dry environments and can be steered. The microrobot includes a novel resonant leg mechanism that couples with a Nd:YAG pulsing laser beam at tunable frequencies, thus producing differential driving forces that can be selectively used for both driving and turning of the microrobot. Specifically, the SerpenBot includes two micromachined silicon thermal actuators with serpentine design and a motion amplification flexure, that are stimulated using different modulated laser pulse frequencies. We present analysis, simulation, and experimental results demonstrating the successful maneuverability of the SerpenBot on a dry Silicon substrate.