Automated analysing of thin film nanoindentation data using the concept of the effectively shaped indenter
Automated analysing of thin film nanoindentation data using the concept of the effectively shaped indenter
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使用有效成形压头的概念自动分析薄膜纳米压痕数据
DOI：
10.1016/j.surfcoat.2006.08.043
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发表时间：
2006
影响因子：
5.4
通讯作者：
L. Geidel
中科院分区：
文献类型：
--
作者：
N. Schwarzer;L. Geidel
最近开发的分析技术应用的概念，有效地成形压头允许一个更全面的分析纳米压痕数据的薄膜。新的分析程序甚至已成功地应用于远低于100 nm厚的非常薄的涂层的情况下。可以确定重要的物理机械参数，如杨氏模量、相变临界应力和屈服强度。从理论的角度来看，断裂韧性（各种断裂模式的裂纹的临界应力）和内应力原则上应该是可确定的。然而，由于用于这种分析程序的数学装置相当复杂，并且评价的性能非常繁琐且难以学习，因此开发软件工具以提供用于相当自动化的计算过程的特征似乎是合理的。本研究是关于这种分析工具的原则可行性和他们的实现状态。
Recently developed analysing techniques applying the concept of the effectively shaped indenter allow a much more comprehensive analysing of nanoindentation data of thin films. The new analysing procedures have even been successfully applied in the case of very thin coatings well below 100 nm thick. Important physical mechanical parameters like Young's modulus, critical stresses for phase transition and Yield strength can be determined. From the theoretical point of view, fracture toughness (critical stresses for cracks of various fracture modes) and intrinsic stresses should in principle be determinable. However, as the mathematical apparatus for such analysing procedures is rather complex and the performance of the evaluation very cumbersome and difficult to learn, it seems reasonable to develop software tools providing features for a rather automated calculation process. The present study is about the principle feasibility of such analysing tools and the state of their realisation.