Helicon plasma source excited by a flat spiral coil
Helicon plasma source excited by a flat spiral coil
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由扁平螺旋线圈激发的螺旋等离子体源
DOI：
10.1116/1.579491
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发表时间：
1995
期刊：
影响因子：
--
通讯作者：
J. Cecchi
中科院分区：
文献类型：
--
作者：
J. Stevens;M. Sowa;J. Cecchi
我们已经表征了一种具有末端发射天线配置的新型螺旋等离子体源。 13.56 MHz 的功率通过四匝扁平螺旋线圈耦合到 m=0 螺旋模式，并施加弱 (B≳5 G) 轴向磁场。用朗缪尔探针测量等离子体参数，用磁感应探针确定螺旋波场的结构和吸收。在 1-100 mTorr 的压力和 5-60 G 的磁场下，在氩气中产生了 1011-1012 cm−3 的等离子体密度。对于低于 5-10 mTorr 的压力，射频功率吸收主要通过无碰撞朗道阻尼发生，而碰撞阻尼在较高压力下占主导地位。单程吸收发生在小于 20 G 的磁场中。该源不需要单独的源室，因此结合了扁平线圈感应耦合源的紧凑性和波支撑源中远程等离子体生成的优点。该源可以轻松优化以适应各种...
We have characterized a new helicon plasma source with an end‐launch antenna configuration. Power at 13.56 MHz is coupled via a four‐turn flat spiral coil into an m=0 helicon mode with the application of a weak (B≳5 G) axial magnetic field. Plasma parameters were measured with Langmuir probes, and the structure and absorption of the helicon wave fields were determined with magnetic induction probes. Plasma densities of 1011–1012 cm−3 were produced in argon for pressures in the 1–100 mTorr range with a 5–60 G magnetic field. Radio frequency power absorption occurs primarily via collisionless Landau damping for pressures below 5–10 mTorr and collisional damping dominates at higher pressures. Single pass absorption occurs for magnetic fields less than 20 G. This source does not require a separate source chamber, and thus combines the compactness of flat coil inductively coupled sources with the advantages of remote plasma generation found in wave supported sources. The source can be easily optimized for a va...