On the hydrocarbon chemistry in a H2 surface wave discharge containing methane
On the hydrocarbon chemistry in a H2 surface wave discharge containing methane
复制标题
含甲烷的 H2 表面波放电中的碳氢化合物化学
DOI：
10.1088/0963-0252/10/1/308
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发表时间：
2001
影响因子：
3.8
通讯作者：
A. Rousseau
中科院分区：
文献类型：
--
作者：
L. Mechold;J. Röpcke;X. Duten;A. Rousseau
采用可调谐红外二极管激光吸收光谱技术，在不同流量（Φ = 22-385 sccm）和压力（p = 0.1-4 Torr）下，对含10%甲烷的H2表面波放电（f = 2.45 GHz，功率密度≈10-50 W cm-3）中甲基自由基和四个稳定分子CH4、C2H2、C2H4和C2H6进行了检测。甲烷前体的解离度在20% ~ 85%之间，甲基自由基浓度在1012分子cm-3范围内。血浆中甲基自由基浓度和稳定的C-2烃（C2H2、C2H4、C2H6）浓度随CH4添加量的增加和压力的增加而增加。在表面波放电中，甲烷的破碎率（RF(CH4) = 1×1015-2.5×1016分子J-1）和被测C-2碳氢化合物的转化率（RC(C2Hy): 5×1013-3×1015分子J-1）第一次可以根据流量和压力来估计。采用简单模型考虑了扩散和对流对放电管内烃类浓度空间分布的影响。
Tunable infrared diode laser absorption spectroscopy has been used to detect the methyl radical and four stable molecules, CH4, C2H2, C2H4 and C2H6, in a H2 surface wave discharge (f = 2.45 GHz and power density ≈10-50 W cm-3) containing up to 10% methane under different flows (Φ = 22-385 sccm) and pressures (p = 0.1-4 Torr). The degree of dissociation of the methane precursor varied between 20% and 85% and the methyl radical concentration was found to be in the range of 1012 molecules cm-3. The methyl radical concentration and the concentrations of the stable C-2 hydrocarbons C2H2, C2H4, C2H6, produced in the plasma, increased with an increasing amount of added CH4 as well as with increasing pressure. For the first time, fragmentation rates of methane (RF(CH4) = 1×1015-2.5×1016 molecules J-1) and conversion rates to the measured C-2 hydrocarbons (RC(C2Hy): 5×1013-3×1015 molecules J-1) could be estimated with dependence on the flow and pressure in a surface wave discharge. The influence of diffusion and convection on the spatial distribution of the hydrocarbon concentration in the discharge tube was considered by a simple model.