Modelling, characterization and testing of an ortho-planar micro-valve
Modelling, characterization and testing of an ortho-planar micro-valve
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DOI：
10.1007/s12213-008-0015-9
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发表时间：
2008-12-01
影响因子：
2.3
通讯作者：
Puers, Robert
中科院分区：
文献类型：
--
作者：
Smal, Olivier;Dehez, Bruno;Puers, Robert
本文介绍了一种用于微型泵的正交平面单向微阀的设计、实现和建模。这种阀的主要优点是它们非常紧凑，并且可以由单个扁平材料件制成。弹簧挠度的分析模型已经开发和测试，并将结果与有限元建模进行比较。使用两种制造技术，微放电加工和立体光刻，已经建立了几个0.2 mm孔的原型，并测试了高达7巴的压力。
This paper presents the design, the realization and the modelling of an ortho-planar one-way microvalve that can be used in a micropump. The main advantages of such valves are that they are very compact and can be made from a single flat piece of material. An analytical model of the spring deflection has been developed and tested, and results are compared to Finite Elements Modelling. Several prototypes with a bore of 0.2 mm have been built using two manufacturing techniques, micro Electro Discharge Machining and stereo-lithography, and tested for a pressure up to 7 bars.