Carbon atom and cluster sputtering under low-energy noble gas plasma bombardment
Carbon atom and cluster sputtering under low-energy noble gas plasma bombardment
复制标题
低能惰性气体等离子体轰击下碳原子和团簇溅射
DOI：
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发表时间：
2008
期刊：
影响因子：
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通讯作者：
G. Tynan
中科院分区：
文献类型：
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作者：
E. Oyarzabal;R. Doerner;M. Shimada;G. Tynan
在低入射能量（75-225 eV）的等离子体中，测量了不同稀有气体（Xe, Kr, Ar， Ne和He）离子轰击的出口角分辨碳原子和团簇（C2和C3）溅射产率。利用四极杆质谱仪（QMS）检测溅射中性离子在等离子体中电离的比例，并通过改变目标法线与QMS孔径之间的夹角来获得溅射中性离子的角度分布。用一维蒙特卡罗代码模拟了等离子体和溅射粒子在样品和量子质粒之间的相互作用。通过改变样品与QMS之间的距离，并将模拟结果与实验结果进行最佳拟合，得到了C、C2和C3在不同轰击气体中性下的有效弹性散射截面。通过失重测量得到每种轰击气体的总溅射产率（C+C2+C3），然后计算C、C2和C3的溅射产率。
Exit-angle resolved carbon atom and cluster (C2 and C3) sputtering yields are measured during different noble gas (Xe, Kr, Ar, Ne, and He) ion bombardments from a plasma, for low incident energies (75–225 eV). A quadrupole mass spectrometer (QMS) is used to detect the fraction of sputtered neutrals that is ionized in the plasma and to obtain the angular distribution by changing the angle between the target normal and the QMS aperture. A one-dimensional Monte Carlo code is used to simulate the interaction of the plasma and the sputtered particles in the region between the sample and the QMS. The effective elastic scattering cross sections of C, C2, and C3 with the different bombarding gas neutrals are obtained by varying the distance between the sample and the QMS and by performing a best fit of the simulation results to the experimental results. The total sputtering yield (C+C2+C3) for each bombarding gas is obtained from weight-loss measurements and the sputtering yield for C, C2, and C3 is then calculat...