Characterization of quaternary (Cr,Al) N based films synthesized by cathodic arc method
Characterization of quaternary (Cr,Al) N based films synthesized by cathodic arc method
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阴极电弧法合成四元(Cr,Al)N基薄膜的表征
DOI：
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发表时间：
2007
期刊：
影响因子：
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通讯作者：
Tetsuya Suzuki
中科院分区：
文献类型：
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作者：
Hiroyuki Hasegawa;Kazuhito Ohashi;Shinya Tsukamoto;Takashi Sato;Tetsuya Suzuki
