Electrostatic comb-drive actuator for MEMS relays/switches with double-tilt comb fingers and tilted parallelogram beams
Electrostatic comb-drive actuator for MEMS relays/switches with double-tilt comb fingers and tilted parallelogram beams
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DOI：
10.1088/0960-1317/25/4/045003
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发表时间：
2015-04-01
影响因子：
2.3
通讯作者：
Zhao, Jiahao
中科院分区：
文献类型：
--
作者：
Gao, Yongfeng;You, Zheng;Zhao, Jiahao
MEMS继电器/开关一直是各种MEMS器件中最有趣的热点之一。静电驱动是最常用的驱动原理。设计并制作了一种用于MEMS继电器/开关的面内静电梳齿驱动器。为了满足MEMS继电器/开关的要求，提出了双倾斜梳齿和倾斜梳齿梁。测量了恢复力曲线、驱动力曲线和吸合电压。双倾斜手指被发现有一个更大的驱动力比传统的矩形手指，和pull-in电压降低了25%，通过更换矩形手指与双倾斜手指。此外，倾斜的悬臂梁提供了一个凸向上的恢复力曲线，这是更适合于MEMS继电器/开关比传统的力曲线。
MEMS relays/switches have been some of the most interesting hotspots in all kinds of MEMS devices for decades. Electrostatic actuation is the most popular actuation principle. A novel in-plane electrostatic comb-drive actuator for MEMS relays/switches was designed and fabricated. Double-tilt comb fingers and tilted parallelogram beams were proposed to achieve the requirements of MEMS relays/switches. The restoring force curve, actuation force curve, and pull-in voltage were measured. Double-tilt fingers were found to have a larger actuation force than traditional rectangular fingers, and the pull-in voltage was decreased by 25% by replacing rectangular fingers with double-tilt fingers. In addition, tilted parallelogram beams provided a convex upward restoring force curve, which was more suitable for MEMS relays/switches than the conventional force curve.