Palladium-silver thin film for hydrogen sensing
Palladium-silver thin film for hydrogen sensing
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DOI：
10.1016/j.snb.2006.07.030
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发表时间：
2007-04-10
影响因子：
8.4
通讯作者：
Feng, Ying
中科院分区：
文献类型：
--
作者：
Wang, Min;Feng, Ying
本文制备了一种用于氢气传感的钯银薄膜。采用光刻、溅射和电子束真空蒸发等微加工技术，在多孔氧化铝基底上制备了一种钯-银（Pd-Ag）微结构。两种金属的原子比控制在Pd：Ag = 3：2。为了评估所制造的装置的H-2敏感性，测量膜的电阻朝向氢浓度变化。实验结果表明，该传感元件具有灵敏度高、响应速度快、对氢气具有良好的可逆性等特点。混合金属膜的传感性能远优于钯膜。该传感器具有良好的应用前景，可用于室温氢气泄漏检测及相关应用。(c)2006 Elsevier B. V.保留所有权利。
In this paper, a palladium-silver (Pd-Ag) thin film was fabricated and studied for hydrogen gas sensing. A zigzag-shaped microstructure of Pd-Ag was coated on a porous alumina substrate through a combination of microfabrication techniques including photolithography, thin film sputtering and electron beam vacuum evaporation. The atomic ratio of the two metals is controlled at Pd:Ag = 3:2. To evaluate the H-2 sensitivity of the fabricated device, the electrical resistance of the film was measured toward hydrogen concentration change. Experimental results show that the sensing element fabricated this way demonstrates high sensitivity, fast response and excellent reversibility to hydrogen gas. The sensing performance of the mixed metal film is much better than that of the palladium film. The present sensor is promising for room temperature hydrogen leakage detection and related applications. (c) 2006 Elsevier B.V. All rights reserved.