Design, fabrication, and analysis of chirped multilayer mirrors for reflection of extreme-ultraviolet attosecond pulses.
Design, fabrication, and analysis of chirped multilayer mirrors for reflection of extreme-ultraviolet attosecond pulses.
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DOI：
10.1364/ao.45.004147
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发表时间：
2006-06
期刊：
影响因子：
1.9
通讯作者：
A. Wonisch;U. Neuhäusler;N. Kabachnik;T. Uphues;M. Uiberacker;V. Yakovlev;F. Krausz;M. Drescher;U. Kleineberg;U. Heinzmann
中科院分区：
文献类型：
--
作者：
A. Wonisch;U. Neuhäusler;N. Kabachnik;T. Uphues;M. Uiberacker;V. Yakovlev;F. Krausz;M. Drescher;U. Kleineberg;U. Heinzmann
啁啾Mo/Si多层膜已被设计，制造和表征用于极紫外阿秒实验。在基于遗传算法的优化过程中，通过数值模拟阿秒脉冲从多层膜反射镜的反射，我们得到了优化的层设计。我们表明，正入射啁啾多层膜反射镜能够反射约100阿秒（as）持续时间的脉冲，可以通过提高反射率带宽和优化相移行为的设计。啁啾的多层膜已被制造的电子束蒸发在一个可调真空结合离子束抛光的接口和原位反射率测量层厚度控制。为了分析硬X射线反射计的非周期性层结构，我们已经开发了一个自动拟合程序，使我们能够确定各个层的厚度，误差小于0.05纳米。所制造的啁啾镜可用于产生150-160作为脉冲。
Chirped Mo/Si multilayer coatings have been designed, fabricated, and characterized for use in extreme-ultraviolet attosecond experiments. By numerically simulating the reflection of the attosecond pulse from a multilayer mirror during the optimization procedure based on a genetic algorithm, we obtain optimized layer designs. We show that normal incidence chirped multilayer mirrors capable of reflecting pulses of approximately 100 attoseconds (as) duration can be designed by enhancing the reflectivity bandwidth and optimizing the phase-shift behavior. The chirped multilayer coatings have been fabricated by electron-beam evaporation in an ultrahigh vacuum in combination with ion-beam polishing of the interfaces and in situ reflectivity measurement for layer thickness control. To analyze the aperiodic layer structure by hard-x-ray reflectometry, we have developed an automatic fitting procedure that allows us to determine the individual layer thicknesses with an error of less than 0.05 nm. The fabricated chirped mirror may be used for production of 150-160 as pulses.