Tailoring the lubricative and electroconductive bifunction properties of NbSe2 film by controlling the sputtering plasma
Tailoring the lubricative and electroconductive bifunction properties of NbSe2 film by controlling the sputtering plasma
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通过控制溅射等离子体调节 NbSe2 薄膜的润滑和导电双功能特性
DOI：
10.1016/j.apsusc.2018.06.096
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发表时间：
2018-10
影响因子：
6.7
通讯作者：
Hao Junying
中科院分区：
文献类型：
--
作者：
Liu Jinyu;Sui Xudong;Xu Shusheng;Zhang Shuaituo;Hao Junying
过渡金属二硫属化合物具有优异的润滑性能。本文采用溅射法制备了NbSe_2薄膜。采用X射线能谱（EDS）、X射线光电子能谱（XPS）、场发射扫描电子显微镜（FE-SEM）、掠入射X射线衍射（GIXRD）、高分辨透射电子显微镜（HRTEM）、四探针仪和球-盘摩擦磨损试验机研究了NbSe 2薄膜的微观结构、导电性和摩擦学性能。结果表明，通过简单控制溅射功率，可以对NbSe 2薄膜的微观结构进行调控。180 W的合适功率促进了NbSe 2薄膜的边面取向晶体生长和柱状结构的形成，具有较低的静态接触电阻率和与钢基良好的结合强度。低功率和高功率下形成的致密膜和疏松膜的接触润滑性能均呈下降趋势。从薄膜的致密化、结晶度以及摩擦过程中在摩擦副表面形成的转移膜等方面探讨了其机理。这种新型的NbSe 2薄膜具有低摩擦和动态接触电阻特性，有望成为润滑和润滑双功能材料应用的一个更可行的候选者。
Transition metal dichalcogenides are well known for their outstanding lubricating property. The special one of the family members, metallic NbSe2film, was deposited by sputtering in this study. The microstructure, electrical conductivity and tribological properties of NbSe2films were investigated by energy dispersive X-ray spectroscopy (EDS), X-ray photoelectron spectroscopy (XPS), field emission scanning electron microscopy (FE-SEM), grazing incidence X-ray diffraction (GIXRD), high resolution transmission electron microscopy (HRTEM), four-probe meter and ball-on-disk tribometer. The results showed that the microstructure of NbSe2film could be tailored by simply controlling the sputtering power. The suitable power of 180 W promoted to crystal growth of NbSe2film with edge plane orientation and formation of columnar structure, which possessed low static contact electrical resistivity and good adhesive strength on steel substrate. Both the dense and loose films made by lower and higher power, respectively, exhibited the downtrend of contact electroconductive and lubricative properties. The mechanism was discussed in terms of densification and crystallinity of films and transfer film formed on counterpart surface after sliding friction process. This novel NbSe2film with low friction and dynamic contact electrical resistance behaviors was expected to a more feasible candidate for lubricative and electroconductive bifunctional material application.
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