Tunable, membrane-based, pneumatic micro-mirrors
Tunable, membrane-based, pneumatic micro-mirrors
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DOI：
10.1088/1464-4258/8/7/s03
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发表时间：
2006-07-01
期刊：
影响因子：
--
通讯作者：
Zappe, H.
中科院分区：
文献类型：
--
作者：
Werber, A.;Zappe, H.
提出了一种基于膜的可调谐微镜的新颖设计，该设计使用在干蚀刻硅基板上通过旋涂工艺制造的弹性体膜。硅镜从基板上蚀刻而成，固定在50μm厚的高弹性薄膜上，并由气动压力驱动，相对于基板表面提供大偏转和从0度到75度的大范围偏转角度。压力驱动不需要高电压来实现大角度或行程，使得这种方法适合内窥镜医疗应用。倾斜镜和活塞镜以及镜阵列可以通过这种技术制造。
A novel design for tunable, membrane-based micro-mirrors is presented, using an elastomer membrane fabricated in a spin-coating process on a dry etched silicon substrate. The silicon mirror is etched from the substrate, fixed to the highly elastic 50 mu m thick membrane and actuated by pneumatic pressure, which provides large deflection and a large range of deflection angle from 0 degrees to 75 degrees, relative to the substrate surface. Pressure actuation does not require high voltages to achieve large angles or stroke, making this approach suitable for endoscopic medical applications. Tilting mirrors and piston mirrors, as well as mirror arrays, may be made by this technique.