The formation of silicon (111) boron surface phases and their influence on the epitaxial growth of silicon and germanium
The formation of silicon (111) boron surface phases and their influence on the epitaxial growth of silicon and germanium
复制标题
硅(111)硼表面相的形成及其对硅、锗外延生长的影响
DOI:
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发表时间:
2000
期刊:
影响因子:
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通讯作者:
I. Eisele
中科院分区:
文献类型:
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作者:
J. Schulze;H. Baumgärtner;C. Fink;G. Dollinger;I. Gentchev;L. Goergens;W. Hansch;H. Hoster;T. Metzger;R. Paniago;T. Stimpel;T. Sulima;I. Eisele