Attainment of 40.5 pm spatial resolution using 300 kV scanning transmission electron microscope equipped with fifth-order aberration corrector
Attainment of 40.5 pm spatial resolution using 300 kV scanning transmission electron microscope equipped with fifth-order aberration corrector
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DOI：
10.1093/jmicro/dfx122
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发表时间：
2018-02-01
期刊：
影响因子：
1.8
通讯作者：
Ikuhara, Yuichi
中科院分区：
文献类型：
--
作者：
Morishita, Shigeyuki;Ishikawa, Ryo;Ikuhara, Yuichi
在扫描电子显微镜中实现用于高分辨率成像的精细电子探针需要技术的发展，特别是在电子光学方面。为此，我们研制了一台工作在300千伏、具有五级像差校正器的显微镜。在实验的朗奇图中，表示无像差角的对比度平坦区被扩展到70mrad。在300kV的扫描电子显微镜上，使用会聚角为40mrad的探头，获得了40.5 pM的空间分辨率，这是沿[212]方向观察到的GaN的Ga-Ga原子柱之间的投影间距。
The achievement of a fine electron probe for high-resolution imaging in scanning transmission electron microscopy requires technological developments, especially in electron optics. For this purpose, we developed a microscope with a fifth-order aberration corrector that operates at 300 kV. The contrast flat region in an experimental Ronchigram, which indicates the aberration-free angle, was expanded to 70 mrad. By using a probe with convergence angle of 40 mrad in the scanning transmission electron microscope at 300 kV, we attained the spatial resolution of 40.5 pm, which is the projected interatomic distance between Ga-Ga atomic columns of GaN observed along [212] direction.