Self-assembly of highly sensitive 3D magnetic field vector angular encoders
Self-assembly of highly sensitive 3D magnetic field vector angular encoders
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DOI：
10.1126/sciadv.aay7459
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发表时间：
2019-12-01
期刊：
影响因子：
13.6
通讯作者：
Schmidt, Oliver G.
中科院分区：
文献类型：
--
作者：
Becker, Christian;Karnaushenko, Daniil;Schmidt, Oliver G.
新型机器人、生物电子和诊断系统需要各种紧凑和高性能的传感器。其中，需要紧凑的三维（3D）矢量角编码器来确定三维环境中的空间位置和方向。然而，三维矢量传感器的制造是一项具有挑战性的任务，耗时且昂贵，需要在三维空间中对单个传感器元素的方向进行顺序处理。在这项工作中，我们展示了3D自组装的潜力，可以同时重新定向大量巨磁阻（GMR）自旋阀传感器，用于智能制造3D磁性角编码器。在自组装过程中，GMR传感器在三个笛卡尔平面内同时进入所需的正交位置，从而产生单片高性能器件。我们制作的矢量角编码器在所有方向上具有0.14度的等效角精度，并且在高达1 kHz的高速工作时具有低噪声和低功耗。
Novel robotic, bioelectronic, and diagnostic systems require a variety of compact and high-performance sensors. Among them, compact three-dimensional (3D) vector angular encoders are required to determine spatial position and orientation in a 3D environment. However, fabrication of 3D vector sensors is a challenging task associated with time-consuming and expensive, sequential processing needed for the orientation of individual sensor elements in 3D space. In this work, we demonstrate the potential of 3D self-assembly to simultaneously reorient numerous giant magnetoresistive (GMR) spin valve sensors for smart fabrication of 3D magnetic angular encoders. During the self-assembly process, the GMR sensors are brought into their desired orthogonal positions within the three Cartesian planes in a simultaneous process that yields monolithic high-performance devices. We fabricated vector angular encoders with equivalent angular accuracy in all directions of 0.14 degrees, as well as low noise and low power consumption during high-speed operation at frequencies up to 1 kHz.