Incorporation of nitrogen in Cr/Sc multilayers giving improved soft x-ray reflectivity
Incorporation of nitrogen in Cr/Sc multilayers giving improved soft x-ray reflectivity
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DOI：
10.1063/1.2857459
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发表时间：
2008-03-03
影响因子：
4
通讯作者：
Birch, Jens
中科院分区：
文献类型：
--
作者：
Ghafoor, Naureen;Eriksson, Fredrik;Birch, Jens
通过在磁控溅射过程中有意引入氮气，双层厚度为 Lambda=1.56 nm 的 Cr/Sc 多层的软 X 射线反射率 (SXR) 提高了 100%。在背景压力下沉积的多层膜
Soft x-ray reflectivity (SXR) of Cr/Sc multilayer with bilayer thickness of Lambda=1.56 nm was increased by 100% by an intentional introduction of nitrogen during magnetron sputtering. Multilayers deposited at background pressures of